SCOPUS 정보 검색 플랫폼

Volumn 43, Issue 4 B, 2004, Pages

Emission characteristics of extreme ultraviolet radiation from CO 2 laser-produced xenon plasma

Author keywords

CO2 laser; Extreme ultraviolet lithography; Extreme ultraviolet sources; Laser produced plasmas; Xenon

Indexed keywords

CAMERAS; CARBON DIOXIDE; CHARGE COUPLED DEVICES; LASER BEAMS; LIGHT EMISSION; LITHOGRAPHY; PLASMAS; XENON;

DISCHARGED PRODUCED PLASMA (DPP); EXTREME ULTRAVIOLET (EUV); FULL WIDTH AT HALF-MAXIMUM (FWHM);

ULTRAVIOLET RADIATION;

EID: 3042708428 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.43.l585 Document Type: Article

Times cited : (36)

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