An electrothermomechanical lumped element model of an electrothermal bimorph actuator

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 213-225

  Todd, Shane T ^a   Xie, Huikai ^b  

^a University of California   (United States)

^b University of Florida   (United States)

Author keywords

Bimorph; Electrothermal modeling; Electrothermomechanical modeling; Lumped element modeling; Micromirror; Thermal actuator; Thermomechanical modeling

Indexed keywords

ANGULAR MOMENTUM; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; MATHEMATICAL MODELS;

BIMORPH ACTUATOR; LUMPED ELEMENT MODELING; MICROMIRROR; THERMAL ACTUATOR;

ACTUATORS;

EID: 40449096071     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.908754     Document Type: Article

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