Measurement of elastic modulus, Poisson ratio, and coefficient of thermal expansion of on-wafer submicron films

Journal of Applied Physics

Volumn 85, Issue 9, 1999, Pages 6421-6424

  Zhao, Jie Hua ^a   Ryan, Todd ^a   Ho, Paul S ^a   McKerrow, Andrew J ^b   Shih, Wei Yan ^b  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; FOURIER TRANSFORM INFRARED SPECTROSCOPY; POISSON RATIO; SEMICONDUCTING GALLIUM ARSENIDE; SILANES; SILICA; SILICON WAFERS; STRESS ANALYSIS; THERMAL EFFECTS; THERMAL EXPANSION; THERMAL STRESS;

BENDING BEAM METHOD; TETRAETHYLORTHOSILANE; THERMAL EXPANSION COEFFICIENTS;

DIELECTRIC FILMS;

EID: 0032613383     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370146     Document Type: Article

References (18)

1. P. Ambree, F. Kreller, R. Wolf, and K. Wandel, J. Vac. Sci. Technol. B 11, 614 (1993).
2. I. Blech and U. Cohen, J. Appl. Phys. 53, 4202 (1982).
3. G. Carlotti, L. Douce, and M. Dupeux, J. Vac. Sci. Technol. B 14, 3460 (1996).
4. J. T. Fitch, G. Lucovsky, R. Kobeda, and E. A. Irene, J. Vac. Sci. Technol. B 7, 153 (1989).
5. J. T. Fitch, C. H. Bjorkman, G. Lucovsky, F. H. Pollak, and X. Yin, J. Vac. Sci. Technol. B 7, 775 (1989).
6. B. A. Auld, Acoustic Field and Waves in Solids (Wiley, New York, 1973), Vol. 2, p. 368.
7. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
8. J.-H. Jou and L. Hsu, J. Appl. Phys. 69, 1384 (1991).
9. I.-S. Yeo, P. S. Ho, and S. G. Anderson, J. Appl. Phys. 78, 945 (1995).
10. P. H. Townsend, D. M. Barnett, and T. A. Brunner, J. Appl. Phys. 62, 4438 (1987).
11. R. R. Reeber and K. Wang, Mater. Chem. Phys. 46, 259 (1996).
12. Landolt-Bornstein, Numerical Data and Functional Relationships in Science and Technology (Springer, Berlin, 1966), Group III, Vol. 1.
13. INSPEC, Properties of Gallium Arsenide, EMIS Data reviews Ser. No. 2 (The Institute of Electrical Engineers, London, 1986).
14. I.-S. Yeo, PhD. dissertation, University of Texas at Austin, 1996.
15. M. S. Haque, H. A. Naseem, and W. D. Brown, J. Appl. Phys. 81, 3129 (1997).
16. T. J. Delph, J. Appl. Phys. 83, 786 (1998).
17. E. Kobeda and E. A. Irene, J. Vac. Sci. Technol. B 7, 163 (1989).
18. ABAQUS 5.6 Standard User's Manual, Hibbitt, Karlsson, & Sorensen, Inc., Pawtucket, RI, 1996.