Optimization of thermally actuated bimorph cantilevers for maximum deflection

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 376-379

  Peng, Wuyong ^a   Xiao, Zhixiong ^a   Farmer, K R ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bimorph cantilever; Maximum deflection; MEMS; Optimization; Thermal actuation

Indexed keywords

BIMORPH CANTILEVERS; CANTILEVER DEFLECTION; THERMAL ACTUATION;

CANTILEVER BEAMS; COMPUTER SIMULATION; ELASTIC MODULI; NUMERICAL METHODS; THERMAL EFFECTS; THERMAL EXPANSION;

MICROELECTROMECHANICAL DEVICES;

EID: 6344258551     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. G. A. Gehring, et. al, Smart Mater. Struct., vol.9, pp.918-931, 2000.
3. A. Kruusing, Smart Mater. Struct., vol.9, pp. 186-196, 2000.
4. W. H. Chu, et. al, J. Micromech. Microeng., vol.3, pp.4-7, 1993.
5. H. E. Salzer, et. al, 'Table for the solution of cubic equations", McGraw-Hill, New York, 1958.