An analytical electrothermal model of a 1-D electrothermal MEMS micromirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5649, Issue PART 1, 2005, Pages 344-353

  Todd, Shane T ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

Electrothermal actuation; Heat transport; Lumped element modeling; MEMS; Micromirror

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTROCHEMISTRY; FINITE ELEMENT METHOD; HEAT TRANSFER; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; ONE DIMENSIONAL; OPTIMIZATION; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS;

ELECTROTHERMAL ACTUATION; HEAT TRANSPORT; LUMPED ELEMENT MODELING; MEMS; MICROMIRRORS;

MIRRORS;

EID: 20044373479     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.582136     Document Type: Conference Paper

References (10)

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