Steady-state 1D electrothermal modeling of an electrothermal transducer

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2264-2276

  Todd, Shane T ^a,b   Xie, Huikai ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; HEAT TRANSFER; MATHEMATICAL MODELS; THERMAL EFFECTS;

ELECTROTHERMAL MODELS; ELECTROTHERMAL TRANSDUCERS; HEAT TRANSPORT EQUATION; THERMAL PARAMETERS;

TRANSDUCERS;

EID: 27944449573     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/008     Document Type: Article

References (17)

1. Xie H, Pan Y and Fedder G K 2003 Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror Sensors Actuators A 103 237-41
2. Xie H, Jain A, Xie T, Pan Y and Fedder G K 2003 A single-crystal silicon-based micromirror with large scanning angle for biomedical applications Technical Digest CLEO 2003 (Baltimore, MD)
3. Jain A and Xie H 2005 A tunable microlens scanner with large-vertical-displacement actuation 18th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2005) (Miami Beach, FL, January) pp 92-5
4. Manginell R P, Smith J H, Ricco A J, Hughes R C, Moreno D J and Huber R J 1997 Electro-thermal modeling of a microbridge gas sensor SPIE Symp. on Micromachining and Microfabrication (Austin, TX) pp 360-71
5. Robert P, Saias D, Billard C, Boret S, Sillon N, Maeder-Pachurka C, Charvet P L, Bouche G, Ancey P and Berruyer P 2003 Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2003) pp 1714-7
6. Vettiger P et al 2002 The Millepede-nanotechnology entering data storage IEEE Trans. Nanotechnol. 1 39-55
7. Geisberger A A, Sarkar N, Ellis M and Skidmore G D 2003 Electrothermal properties and modeling of polysilicon microthermal transducers J. Microelectromech. Syst. 12 513-22
8. Tai Y C, Mastrangelo C H and Muller R S 1998 Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films J. Appl. Phys. 63 1442-7
9. Mastrangelo C H 1991 Thermal applications of microbridges PhD Dissertation University of California, Berkeley
10. Fedder G K and Howe R T 1991 Thermal assembly of polysilicon microstructures IEEE Micro Electro Mechanical Systems Workshop 1991 pp 63-8
11. Lin L and Chiao M 1996 Electrothermal responses of lineshape microstructures Sensors Actuators A 55 35-41
12. Huang Q-A and Lee N K S 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64-70
13. Hickey R, Kujath M and Hubbard T 2002 Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators J. Vacuum Sci. Technol. A 20 971-4
14. Yan D, Khajepour A and Mansour R 2004 Design and modeling of a MEMS bidirectional vertical thermal transducer J. Micromech. Microeng. 14 841-50
15. Lammel G, Schweizer S and Renaud P 2002 Optical Microscanners and Microspectrometers Using Thermal Bimorph Transducers (Boston, MA: Kluwer)
16. Todd S T 2005 Electrothermomechanical modeling of a 1-D electrothermal MEMS micromirror MS Thesis University of Florida
17. Todd S T and Xie H 2004 An analytical electrothermal model of a 1-D electrothermal MEMS micromirror Proc. SPIE 5649 344-53