Modeling of thermal actuation in a bulk-micromachined CMOS micromirror

Microelectronics Journal

Volumn 31, Issue 9, 2000, Pages 791-801

  Liew, L A ^a   Tuantranont, A ^a   Bright, V M ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; TEMPERATURE DISTRIBUTION;

BIMORPH THEORY; MICROELECTROMECHANICAL MIRRORS; THERMAL EXPANSION COEFFICIENT (CTE);

CMOS INTEGRATED CIRCUITS;

EID: 0034301277     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(00)00061-6     Document Type: Article

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