Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 237-241

  Xie, Huikai ^a,e   Pan, Yingtian ^c,d   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

^d UNIVERSITY OF PITTSBURGH   (United States)

^e University of Florida   (United States)

Author keywords

Bimorph; Micromirror; Optical coherence tomography (OCT); Single crystal silicon

Indexed keywords

ACTUATORS; ALUMINUM; CMOS INTEGRATED CIRCUITS; COATINGS; ELECTRIC CURRENTS; ENDOSCOPY; LASER BEAMS; MEDICAL IMAGING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; REACTIVE ION ETCHING; RESONANCE; SCANNING; SINGLE CRYSTALS; TOMOGRAPHY;

MICROMIRRORS;

MIRRORS;

EID: 0037438884     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00347-3     Document Type: Conference Paper

References (12)

1. L.J. Hornbeck, Digital light processing and MEMS: an overview, in: Digest of the IEEE/LEOS 1996 Summer Topical Meetings, Keystone, CO, USA, August 5-9, 1996, pp. 7-8.
2. V.A. Aksyuk, F. Pardo, C.A. Bolle, S. Arney, C.R. Giles, D.J. Bishop, Lucent Microstar micromirror array technology for large optical crossconnects, in: Proceedings of the SPIE, International Society of Optical Engineering (USA), Santa Clara, CA, USA, September 18-20, 2000, pp. 320-324.
3. G.J. Tearney, M.E. Brezinski, B.E. Bouma, S.A. Boppart, C. Pitris, J.F. Southern, J.G. Fujimoto, In vivo endoscopic optical biopsy with optical coherence tomography, Science 276 (1997) 2037-2039.
4. A.M. Sergeev, et al., In vivo endoscopic OCT imaging of precancer and cancer states of human mucosa, Opt. Express 1 (1997) 432-440.
5. R. Conant, J. Nee, K. Lan, R. Muller, A flat high-frequency scanning micromirror, in: Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 2-6, 1996, pp. 6-9.
6. G.-D. Su, H. Toshiyoshi, M.C. Wu, Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors, IEEE Photon. Technol. Lett. 13 (2001) 606-608.
7. H. Xie, G.K. Fedder, A CMOS-MEMS lateral-axis gyroscope, in: Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland, January 21-25, 2001, pp. 162-165.
8. J. Buhler, J. Funk, O. Paul, F.-P. Steiner, H. Balms, Thermally actuated CMOS micromirrors, Sensor Actuator A 47 (1995) 572-575.
9. H. Xie, L. Erdmann, X. Zhu, K. Gabriel, G. Fedder, Post-CMOS processing for high-aspect-ratio integrated silicon microstructures, J. Microelectromech. Syst. 11 (2002) 93-101.
10. J. Buhler, Deformable micromirror arrays by CMOS technology, Ph.D. Thesis, ETH Zurich, 1997.
11. M.S.-C. Lu, X. Zhu, G.K. Fedder, Mechanical property measurement of 0.5 μm CMOS microstructures in: Proceedings of the Materials Research Society 1998 Speing Meeting, San Francisco, CA, April 1998, pp. 27-32.
12. Y. Pan, H. Xie, G.K. Fedder, Endoscopic optical coherence tomography based on a microelectromechanical mirror, Opt. Lett. 26 (2001) 1966-1968.