A multi-degree-of-freedom micromirror utilizing inverted-series-connected bimorph actuators

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Todd, Shane T ^a,b   Jain, Ankur ^a   Qu, Hongwei ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

^b University of California   (United States)

Author keywords

Bimorph actuator; MEMS device; Micromirror

Indexed keywords

COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); FINITE ELEMENT METHOD; MICROOPTICS; MOS DEVICES; PROBLEM SOLVING;

BIMORPH ACTUATOR; MEMS DEVICES; MICROFABRICATION; MICROMIRRORS;

MIRRORS;

EID: 33745219388     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S10     Document Type: Article

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