Macro and microsurface morphology reconstructions during laser-induced etching of silicon

Micron

Volumn 39, Issue 3, 2008, Pages 287-293

  Kumar, Rajesh ^a   Mavi, H S ^a   Shukla, A K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

AFM; Laser induced etching; SEM; Surface morphology

Indexed keywords

ETCHING; PORE STRUCTURE; RECONSTRUCTION (STRUCTURAL); SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY;

ETCHING RATE; LASER POWER DENSITIES; MACROSURFACE MORPHOLOGY; MICROSURFACE MORPHOLOGY RECONSTRUCTIONS;

SILICON COMPOUNDS;

EID: 39549106014     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2007.04.005     Document Type: Article

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