Monte Carlo simulation of anisotropic etching of silicon: Investigation of (111) surface properties

Modelling and Simulation in Materials Science and Engineering

Volumn 5, Issue 5, 1997, Pages 481-488

  Moktadir, Zakaria ^a   Camon, Henri ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; CRYSTAL ORIENTATION; MONTE CARLO METHODS; SILICON; SUBSTRATES; SURFACE ROUGHNESS;

ANISOTROPIC ETCHING;

ETCHING;

EID: 0031224089     PISSN: 09650393     EISSN: None     Source Type: Journal    
DOI: 10.1088/0965-0393/5/5/004     Document Type: Article

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