Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 79, Issue 1, 2001, Pages 71-77

  Rasheed, B G ^a   Mavi, H S ^a   Shukla, A K ^a   Abbi, S C ^a   Jain, K P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER BEAM EFFECTS; MORPHOLOGY; NEODYMIUM LASERS; PHOTOLUMINESCENCE; POLYSILICON; QUANTUM EFFICIENCY; RAMAN SPECTROSCOPY; RESONANCE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

LASER-INDUCED ETCHING; QUANTUM CONFINEMENT;

POROUS SILICON;

EID: 0035090816     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00560-2     Document Type: Article

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