Spectroscopic investigations of porous silicon prepared by laser-induced etching of silicon

Journal of Physics D: Applied Physics

Volumn 34, Issue 3, 2001, Pages 292-298

  Mavi, H S ^a   Rasheed, B G ^a   Shukla, A K ^a   Abbi, S C ^a   Jain, K P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ETCHING; LASER BEAM EFFECTS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NEODYMIUM LASERS; PHOTOLUMINESCENCE; PHOTONS; QUANTUM THEORY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

LASER-INDUCED ETCHING;

POROUS SILICON;

EID: 0034825295     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/3/307     Document Type: Article

References (28)

1. Kolasinski K W, Barnard C J, Ganguly S, Koker L, Wellner A, Aindow M, Palmer R E, Field C N, Hamley P A and Poliakoff M 2000 J. Appl. Phys. 88 2472
2. Yamamoto N, Sumiya A and Takai H 2000 Mater. Sci. Eng. B 69-70 205
3. Yamamoto and Takai H 1999 Japan. J. Appl. Phys. 38 5706
4. Stavovoitov A and Bayliss S 1998 Appl. Phys. Lett. 73 1284
5. Noguchi N and Suemune I 1993 Appl. Phys. Lett. 62 1429
6. Ngan M L, Lee K C and Cheah K W 1998 J. Appl. Phys. 83 1637
7. Thonissen M, Borger M G, Fischer A R, Glueck O, Kruger M and Luth H 1996 Thin Solid Films 276 21
8. Jones L A, Yukseker O and Thomas D F 1996 J. Vac. Sci. Technol. 14 1505
9. Choy C H and Cheah K W 1995 Appl. Phys. A D61 45
10. Cheah K W and Choy C H 1994 Solid State Commun. 91 795
11. Beale M I J, Benjamine J D, Uren M J, Chew N G and Cullis A G 1985 J. Cryst. Growth 73 622
12. Lehmann V and Gosele U 1991 Appl. Phys. Lett. 58 856
13. Canham L T 1990 Appl. Phys. Lett. 75 1046
14. Guha S, Steinev P and Lang W 1996 J. Appl. Phys. 79 8664
15. John C G and Singh V A 1996 Phys. Rev. B 54 4416
16. Kocka J, Palant I and Fejfar A J 1996 Non-Cryst. Solids 198-200 857
17. Latant S and Vial J C 1998 J. Appl. Phys. 84 1041
18. Brunetto N and Armato G 1997 Thin Solid Films 297 122
19. Kanemitsu Y, Uto H, Masumoto Y, Matsomoto T, Futagi T and Mimura H 1993 Phys. Rev. B 48 2827
20. Zi J, Buscher H, Falter C, Ludwig W, Zhang K and Xie X 1996 Appl. Phys. Lett. 69 200
21. Galiy P V, Lesivn T I, Monastyrskii L S, Nenchuk T M and Olenych I B 1998 Thin Solid Films 318 113
22. Ossadnik Ch, Veprek S and Gregora I 1999 Thin Solid Films 337 148
23. Tsu R, Shen H and Dutta M 1992 Appl. Phys. Lett. 60 112
24. Richter H, Wang Z P and Ley L 1981 Solid State Commun. 39 625
25. Campbell I H and Fauchet P M 1986 Solid State Commun. 58 739
26. Suemoto T, Tanaka K, Nakajima A and Itukura T 1993 Phys. Rev. Lett. 70 3659
27. Yorikawa H and Muramatsu S 1997 Appl. Phys. Lett. 71 644
28. Hill N A and Whaley K B 1995 Phys. Rev. Lett. 75 1130