Silicon nanofabrication by electron beam lithography and laser-assisted electrochemical size-reduction

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 563-568

  Juhasz, Robert ^a   Linnros, Jan ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Electrochemical etching; Laser assisted etching; Nanostructures; Silicon nanofabrication; Size reduction

Indexed keywords

ELECTRIC POTENTIAL; ELECTROCHEMISTRY; ELECTRON BEAM LITHOGRAPHY; LASER APPLICATIONS; NANOTECHNOLOGY; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

ELECTROCHEMICAL ETCHING;

NANOSTRUCTURED MATERIALS;

EID: 0036643613     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00532-4     Document Type: Conference Paper

References (12)