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Volumn 203, Issue 10, 2006, Pages 2444-2450

Formation of Si and Ge quantum structures by laser-induced etching

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; GERMANIUM; LASER BEAMS; NANOSTRUCTURED MATERIALS; PHOTONS; PLASMA ETCHING; SILICON; SILICON WAFERS;

EID: 33748428436     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200521027     Document Type: Article
Times cited : (25)

References (33)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.