Spectroscopic studies of the Sn-based droplet laser plasma EUV source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 2, 2004, Pages 964-970

  Koay, C S ^a   Takenoshita, K ^a   Fujiwara, E ^a,c   Al Rabban, M ^b   Richardson, M ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b QATAR UNIVERSITY   (Qatar)

^c Himeji University   (Japan)

Author keywords

EUV; Laser plasmas; Sources; Tin plasmas

Indexed keywords

EUV; LASER-PLASMAS; SOURCES; TIN PLASMAS;

COMPUTER SIMULATION; DEBRIS; HYDRODYNAMICS; LASER PRODUCED PLASMAS; SPECTROSCOPIC ANALYSIS; TIN; ULTRAVIOLET RADIATION; XENON;

LITHOGRAPHY;

EID: 3843107901     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.541575     Document Type: Conference Paper

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