Efficient extreme ultraviolet emission from xenon-cluster jet targets at high repetition rate laser illumination

Journal of Applied Physics

Volumn 94, Issue 9, 2003, Pages 5489-5496

  Ter Avetisyan, Sargis ^a,b   Vogt, Ulrich ^a,c   Stiel, Holger ^a   Schnürer, Matthias ^a   Will, Ingo ^a   Nickles, Peter V ^a  

^a MAX BORN INSTITUT   (Germany)

^b INSTITUTE FOR PHYSICAL RESEARCH   (Armenia)

^c UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; LASER BEAM EFFECTS; LIGHT SCATTERING; SPECTROMETERS; ULTRAVIOLET RADIATION; X RAYS;

EXTREME ULTRAVIOLET (EUV) EMISSION; LASER ENERGY;

LASER PULSES;

EID: 0242468601     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1614862     Document Type: Article

References (39)

1. Proc. SPIE 3997, Emerging Lithography Technologies IV Proc. (2000).
2. H. Kondo, T. Tomie, and H. Shimizu, Appl. Phys. Lett. 72, 2668 (1998).
3. X-ray Microscopy and Spectromicroscopy, edited by J. Thieme, G. Schmahl, D. Rudolph, and E. Umbach (Springer, Heidelberg, 1998).
4. M. Schnurer, S. Ter-Avetisyan, H. Stiel, U. Vogt, W. Radlof, M. Kalashnikov, W. Sandner, and P. V. Nickles, Eur. Phys. J. D 14, 331 (2001).
5. J. Zweiback, T. Ditmire, and M. D. Perry, Phys. Rev. A 59, R3166 (1999).
6. E. Parra, I. Alexeev, J. Fan, K. Y. Kim, S. J. McNaught, and H. M. Milchberg, Phys. Rev. E 62, R5931 (2000).
7. P. B. Parks, T. E. Cowan, R. B. Stephans, and E. M. Campbell, Phys. Rev. A 63, 063203 (2001).
8. M. Lezius, S. Dobosz, D. Normand, and M. Schmidt, Phys. Rev. Lett. 80, 261 (1998).
9. D. R. Symes, A. J. Comley, J. W. G. Tisch, and R. A. Smith, Appl. Phys. B: Lasers Opt. 80, 4112 (2002).
10. T. Ditmire, T. Donnelly, A. M. Rubenchik, R. W. Falcone, and M. D. Perry, Phys. Rev. A 53, 3379 (1996).
11. H. M. Milchberg, S. J. McNaught, and E. Perra, Phys. Rev. E 64, 056402 (2001).
12. I. Will, A. Liero, D. Merlins, and W. Sandner, IEEE J. Quantum Electron. 34, 2020 (1998).
13. A. J. Bell, J. M. Mestdagh, J. Berlande, X. Biquard, J. Cuvellier, A. Lallement, P. Meynadier, O. Sublemontier, and J.-P. Visticot, J. Phys. D 26, 997 (1993).
14. S. Ter-Avetisyan, M. Schnurer, H. Stiel, U. Vogt, W. Radlof, M. Kalashnikov, W. Sandner, and P. V. Nickles, Phys. Rev. E 64, 036404 (2001).
15. H. P. Birkhofer, P. K. Carroll, J. Costello, and G. O'Sullivan, Her. Bunsenges. Phys. Chem. 88, 207 (1984).
16. O. F. Hagena, Surf. Sci. 106, 101 (1981); O. F. Hagena, Rev. Sci. Instrum. 63, 2374 (1992).
17. O. F. Hagena, Surf. Sci. 106, 101 (1981); O. F. Hagena, Rev. Sci. Instrum. 63, 2374 (1992).
18. O. F. Hagena and W. Obert, J. Chem. Phys. 56, 1793 (1972).
19. T. Ditmire, R. A. Smith, J. W. O. Tisch, and M. H. R. Hutchinson, Phys. Rev, Lett. 78, 3121 (1997).
20. E. Miura, H. Honda, K. Katsura, E. Takahashi, and K. Kondo, Appl. Phys. 70, 783 (2000).
21. T. Ditmire, R. A. Smith, R. S. Majoribanks, O. Kulcsar, and M. H. R. Hutchinson, Appl. Phys. Lett. 71, 166 (1997).
22. K. Kondo, A. B. Borisov, C. Jordan, A. McPherson, W. A. Schroeder, K. Boyer, and C. K. Rhodes, J. Phys. B 30, 2707 (1997).
23. J. Blackburn, P. K. Carroll, J. Costello, and G. O'Sullivan, J. Opt. Soc. Am. 73, 1325 (1983).
24. V. Kaufman, J. Sugar, and J. L. Tech, J. Opt. Soc. Am. 73, 691 (1983).
25. G. O'Sullivan, J. Phys. B 15, L765 (1982).
26. M. McGeoch, Appl. Opt. 37, 1651 (1998).
27. H. Fiedorowicz et al., Opt. Commun. 163, 103 (1999).
28. M. A. Klosner and W. T. Silfast, J. Opt. Soc. Am. B 17, 1279 (2000).
29. H. Honda, E. Miura, K. Katsura, E. Takahashi, and K. Kondo, Phys. Rev. A 61, 023201 (2000).
30. B. A. M. Hansson, L. Rymell, M. Berglund, and H. M. Hertz, Microelectron. Eng. 53, 667 (2000).
31. T. Ditmire, P. K. Palet, R. A. Smith, J. S. Wark, S. J. Rose, D. Milathianaki, R. S. Majoribanks, and M. H. R. Hutchinson, J. Phys. B 31, 2825 (1998).
32. R. Doron, E. Behar, P. Mandelbaum, J. L. Schwob, H. Fiedorowicz, A. Bartnik, R. Jarocki, M. Szczurek, and T. Wilhein, Phys. Rev. A 59, 188 (1999).
33. U. Vogt, H. Stiel, I. Will, P. V. Nickles, W. Sandner, M. Wieland, and T. Wilhein, Appl. Phys. Lett. 79, 2336 (2001).
34. G. D. Kubiak, L. J. Bernardez, K. Krenz, and W. C. Sweatt, Proc. SPIE 3676, 669 (1999).
35. S. Kranzusch and K. Mann, Opt. Commun. 200, 223 (2001).
36. M. Mori, T. Shiraishi, E. Takahashi, H. Suzuki, L. B. Sharma, E. Miura, and K. Kondo, J. Appl. Phys. 90, 3595 (2001).
37. G. Kooijiman, R. de Bruijn, K. Koshelev, F. Bijkerk, W. Shaikh, A. J. Bodey, and G. Hirst, Central Laser Facility Annual Report 2001/2002 〈published online; http://www.clf.rl.ac.uk/Reports/2001-2002/contents.htm〉
38. S. Eliezer, The Interaction of High-Power Lasers with Plasmas (IOP, London, 2002), p. 323.
39. P. V. Nickles, M. Schnürer, H. Stiel, U. Vogt, S. Ter-Avetisyan, and W. Sandner, Proc. SPIE 4504, 106 (2001).