Debris studies for the tin-based droplet laser-plasma EUV source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 2, 2004, Pages 954-963

  Takenoshita, K ^a   Koay, C S ^a   Teerawattanasook, S ^a   Richardson, M ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Debris; Euv source; Inhibition; Ion spectra; Mitigation; Tin plasma

Indexed keywords

EUV SOURCES; INHIBITION; ION SPECTRA; MITIGATION; TIN PLASMAS;

DEBRIS; ELECTROSTATICS; LASER PRODUCED PLASMAS; MIRRORS; MULTILAYERS; TIN; ULTRAVIOLET RADIATION; XENON;

LITHOGRAPHY;

EID: 3843147185     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.541533     Document Type: Conference Paper

References (16)

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2. This work was done under contract for JMar Research Corp, resulting in patents being filed at that time.
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