SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2843-2847

Laser-produced-plasma light source development for extreme ultraviolet lithography

(13) Komori, Hiroshi a Abe, Tamotsu a Suganuma, Takashi a Imai, Yousuke a Sugimoto, Yukihiko a Someya, Hiroshi a Hoshino, Hideo a Soumagne, Georg a Takabayashi, Yuichi a Mizoguchi, Hakaru a Endo, Akira a Toyoda, Koichi a Horiike, Yasuhiro a

a Extreme Ultra Violet Lithography System Development Association (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGE COUPLED DEVICES; LASER PRODUCED PLASMAS; LASER PULSES; LIGHT SOURCES; MIRRORS; NEODYMIUM LASERS; OPTIMIZATION; POWER AMPLIFIERS; X RAY PHOTOELECTRON SPECTROSCOPY; XENON;

CONVERSION EFFICIENCY; LASER SPOT SIZE;

PHOTOLITHOGRAPHY;

EID: 0942289220 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.162781310.1116/1.1627813 Document Type: Article

Times cited : (24)

References (9)

1
- 0036378636
- H. Shields, S. W. Fornaca, M. B. Petach, M. Michaelian, R. D. McGregor, R. H. Moyer, and R. S. Pierre, Proc. SPIE 4688, 94 (2002).
- (2002) Proc. SPIE , vol.4688 , pp. 94
- Shields, H.¹ Fornaca, S.W.² Petach, M.B.³ Michaelian, M.⁴ McGregor, R.D.⁵ Moyer, R.H.⁶ Pierre, R.S.⁷

2
- 0036378687
- B. A. M. Hansson, L. Rymell, M. Berglund, O. Hemberg, E. Janin, J. Thoresen, S. Mosesson, J. Wallin, and H. M. Hertz, Proc. SPIE 4688, 102 (2002).
- (2002) Proc. SPIE , vol.4688 , pp. 102
- Hansson, B.A.M.¹ Rymell, L.² Berglund, M.³ Hemberg, O.⁴ Janin, E.⁵ Thoresen, J.⁶ Mosesson, S.⁷ Wallin, J.⁸ Hertz, H.M.⁹

3
- 0036986502
- E. N. Ragozin, V. E. Levashov, K. N. Mednikov, A. S. Pirozhkov, and P. V. Sasorov, Proc. SPIE 4781, 17 (2002).
- (2002) Proc. SPIE , vol.4781 , pp. 17
- Ragozin, E.N.¹ Levashov, V.E.² Mednikov, K.N.³ Pirozhkov, A.S.⁴ Sasorov, P.V.⁵

4
- 0036980333
- H. Stiel, U. Vogt, S. Ter-Avetysian, M. Schnuerer, I. Will, and P. V. Nickles, Proc. SPIE 4781, 26 (2002).
- (2002) Proc. SPIE , vol.4781 , pp. 26
- Stiel, H.¹ Vogt, U.² Ter-Avetysian, S.³ Schnuerer, M.⁴ Will, I.⁵ Nickles, P.V.⁶

5
- 0345303639
- unpublished
- B. A. M. Hansson, L. Rymell, M. Berglund, O. E. Hemberg, E. Janin, S. Mosesson, J. Thoresen, J. Wallin, B. Jacobsson, M. Wilner, and H. M. Hertz, SPIE International Symposium on Microlithography Presentation, 2003, pp. 5037-5096 (unpublished).
- (2003) SPIE International Symposium on Microlithography Presentation , pp. 5037-5096
- Hansson, B.A.M.¹ Rymell, L.² Berglund, M.³ Hemberg, O.E.⁴ Janin, E.⁵ Mosesson, S.⁶ Thoresen, J.⁷ Wallin, J.⁸ Jacobsson, B.⁹ Wilner, M.¹⁰ Hertz, H.M.¹¹

6
- 0041645895
- M. Schnure, H. Stiel, U. Vogt, S. Avetisyan, I. Will, M. P. Kalachnikov, W. Radoloff, P. Nickles, and W. Sandner, Laser Optoelektron. 33, 50 (2001).
- (2001) Laser Optoelektron. , vol.33 , pp. 50
- Schnure, M.¹ Stiel, H.² Vogt, U.³ Avetisyan, S.⁴ Will, I.⁵ Kalachnikov, M.P.⁶ Radoloff, W.⁷ Nickles, P.⁸ Sandner, W.⁹

7
- 0036534903
- M. Yorozu, J. Yang, Y. Okada, T. Yanagida, F. Sakai, K. Takasago, S. Ito, and A. Endo, Appl. Phys. B: Lasers Opt. B74, 327 (2002).
- (2002) Appl. Phys. B: Lasers Opt. , vol.B74 , pp. 327
- Yorozu, M.¹ Yang, J.² Okada, Y.³ Yanagida, T.⁴ Sakai, F.⁵ Takasago, K.⁶ Ito, S.⁷ Endo, A.⁸

8
- 0036378687
- B. A. M. Hansson, L. Rymell, M. Berglund, O. Hemberg, E. Janin, J. Thoresen, S. Mosesson, J. Wallin, and H. M. Hertz, Proc. SPIE 4688, 102 (2002).
- (2002) Proc. SPIE , vol.4688 , pp. 102
- Hansson, B.A.M.¹ Rymell, L.² Berglund, M.³ Hemberg, O.⁴ Janin, E.⁵ Thoresen, J.⁶ Mosesson, S.⁷ Wallin, J.⁸ Hertz, H.M.⁹

9
- 85010813292
- CD file, 08-Exulite presentation-Fay.pdf (Santa Clara, February)
- B. Fay, EUV Source Workshop, CD file, 08-Exulite presentation-Fay.pdf (Santa Clara, February 2003).
- (2003) EUV Source Workshop
- Fay, B.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.