Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Applied Surface Science

Volumn 254, Issue 7, 2008, Pages 1953-1960

  Chandra, S V Jagadeesh ^a   Uthanna, S ^a   Rao, G Mohan ^b  

^a SRI VENKATESWARA UNIVERSITY   (India)

^b INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Dielectric; Electrical; Optical; Tantalum oxide

Indexed keywords

ABSORPTION SPECTRA; MAGNETRON SPUTTERING; PARTIAL PRESSURE; THERMAL EFFECTS; THIN FILMS;

OXYGEN PARTIAL PRESSURE; POOLE-FRENKEL CONDUCTION MECHANISM; SUBSTRATE TEMPERATURE; TANTALUM OXIDE;

TANTALUM COMPOUNDS;

EID: 37749049535     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.005     Document Type: Article

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