Electrical and transport properties of RF sputtered Ta2O5 on Si

Solid-State Electronics

Volumn 42, Issue 3, 1998, Pages 307-315

  Dimitrova, T ^a   Atanassova, E ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

COLD CATHODE TUBES; ELECTRIC INSULATING MATERIALS; ELECTRON TRAPS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; MOS DEVICES; SCATTERING; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR INSULATOR BOUNDARIES; SPUTTER DEPOSITION; TANTALUM COMPOUNDS; ULSI CIRCUITS;

RADIOFREQUENCY SPUTTERING; SCATTERING CENTERS; TANTALUM PENTOXIDE;

DIELECTRIC FILMS;

EID: 0032019420     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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