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Journal of Materials Science: Materials in Electronics

Volumn 10, Issue 1, 1999, Pages 9-31

Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application - a review

(2) Ezhilvalavan, S a Tseng, T Y a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC CONDUCTIVITY OF SOLIDS; OXIDES; TANTALUM COMPOUNDS; ULSI CIRCUITS;

TANTALUM PENTOXIDE;

DIELECTRIC FILMS;

EID: 0032636629 PISSN: 09574522 EISSN: None Source Type: Journal
DOI: 10.1023/A:1008970922635 Document Type: Article

Times cited : (169)

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