Crystallization improvement of Ta 2O 5 thin films by the addition of water vapor

Journal of Crystal Growth

Volumn 274, Issue 1-2, 2005, Pages 73-77

  Huang, A P ^a   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

A1. Crystal structure; B1. Oxides; B2. Dielectric materials

Indexed keywords

DIRECT TUNNELING CURRENTS; TETRAGONAL STRUCTURES; WATER VAPORS;

CRYSTALLIZATION; DIELECTRIC MATERIALS; DYNAMIC RANDOM ACCESS STORAGE; LIGHT ABSORPTION; MOS DEVICES; TANTALUM COMPOUNDS; VAPORS;

THIN FILMS;

EID: 11144326810     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.10.004     Document Type: Article

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