Micromachined high-resolution accelerometers

Journal of the Indian Institute of Science

Volumn 87, Issue 3, 2007, Pages 333-360

  Krishnan, Girish ^a   Kshirsagar, Chaitanya U ^a   Ananthasuresh, G K ^a   Bhat, Navakanta ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

GRAVITATION; MICROFABRICATION; MICROMACHINING; NETWORKS (CIRCUITS); PRODUCT DESIGN;

ENUNCIATING; HIGH RESOLUTION MICROMACHINED ACCELEROMETERS; MECHANICAL COMPONENTS;

ACCELEROMETERS;

EID: 36949008137     PISSN: 09704140     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

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