A monolithic three-axis micro-g micromachined silicon capacitive accelerometer

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 235-242

  Chae, Junseok ^a   Kulah, Haluk ^a,b   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Inertial sensors; Micro g; Micromachined accelerometer; Sigma delta; Switched capacitor; Three axis accelerometer

Indexed keywords

ACCELEROMETERS; CAPACITORS; CMOS INTEGRATED CIRCUITS; ELECTRODES; ELECTROSTATICS; MICROMACHINING; SENSORS; SILICON; SUBSTRATES;

ELECTROSTATIC MEASUREMENT; INERTIAL SENSORS; MICROMACHINED ACCELEROMETER; SWITCHED CAPACITOR; THREE AXIS ACCELEROMETER;

MICROELECTROMECHANICAL DEVICES;

EID: 18844395074     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839347     Document Type: Article

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