A high-precision, wide-bandwidth micromachined tunneling accelerometer

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 425-433

  Liu, Cheng Hsien ^a   Kenny, Thomas W ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Stanford University   (United States)

Author keywords

Electron tunneling; High precision accelerometer; Robust MEMS

Indexed keywords

CONTROL SYSTEM SYNTHESIS; ELECTRODES; ELECTRON TUNNELING; FEEDBACK CONTROL; INSTRUMENT CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PERFORMANCE; SILICON; UNDERWATER ACOUSTICS;

BULK-SILICON MICROMACHINING PROCESS; ELECTRON TUNNELING TRANSDUCERS; MICROMACHINED TUNNELING ACCELEROMETER;

ACCELEROMETERS;

EID: 0035438954     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946800     Document Type: Article

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