Three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics

IEEE Journal of Solid-State Circuits

Volumn 34, Issue 4, 1999, Pages 456-468

  Lemkin, Mark ^a   Boser, Bernhard E ^b  

^a Integrated Micro Instruments Inc   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CMOS INTEGRATED CIRCUITS; DELTA SIGMA MODULATION; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MICROSENSORS;

POSITION SENSE INTERFACES; THREE AXIS MICROMACHINED ACCELEROMETERS;

ACCELEROMETERS;

EID: 0033116303     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/4.753678     Document Type: Article

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