A two-chip interface for a MEMS accelerometer

IEEE Transactions on Instrumentation and Measurement

Volumn 51, Issue 4, 2002, Pages 853-858

  Kajita, Tetsuya ^a,b   Moon, Un Ku ^a,c   Temes, Gábor C ^a,c  

^a IEEE   (Japan)

^b YAMATAKE CORPORATION   (Japan)

^c Oregon State University   (United States)

Author keywords

Accelerometer; Correlated double sampling (CDS); Delta sigma modulator; Dither; Sensor interface

Indexed keywords

CORRELATED DOUBLE SAMPLING; DELTA-SIGMA MODULATOR; DITHER; MICROELECTROMECHANICAL ACCELEROMETER; SENSOR INTERFACE;

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; DELTA SIGMA MODULATION; INSTRUMENT CIRCUITS; MICROELECTROMECHANICAL DEVICES; MODULATORS; NATURAL FREQUENCIES; OPERATIONAL AMPLIFIERS; SIGNAL TO NOISE RATIO;

ACCELEROMETERS;

EID: 0036703455     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2002.803508     Document Type: Article

References (8)

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