A miniature, high-sensitivity, electron tunneling accelerometer

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 227-231

  Rockstad, Howard K ^a   Tang, T K ^a   Reynolds, J K ^b   Kenny, T W ^b   Kaiser, W J ^c   Gabrielson, Thomas B ^d  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Stanford University   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d NAVAL AIR WARFARE CENTER   (United States)

Author keywords

Accelerometers; Acoustic sensors; Electron tunneling; Hydrophones; Micromachining

Indexed keywords

EID: 0000671745     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01128-4     Document Type: Article

References (18)

1. S.B. Waltman and W.J. Kaiser, An electron tunneling sensor, Sensors and Actuators, 19 (1989) 201-210.
2. T.W. Kenny, S.B. Waltman, J.K. Reynolds and W.J. Kaiser, Micromachined silicon tunnel sensor for motion detection, Appl. Phys. Lett., 58 (1991) 100-102.
3. A.A. Baski, T.R. Albrecht and C.F. Quate, Tunneling accelerometer, J. Microscopy, 157 (1988) 73-76.
4. T.W. Kenny, W.J. Kaiser, J.K. Reynolds, J.A. Podosek, H.K. Rockstad, B.C. Vote and S.B. Waltman, Electron tunnel sensors, J. Vac. Sci. Technol., A10 (1992) 2114-2118.
5. P.M. Zavracky, F. Hartley, N. Sherman, T. Hansen and K. Warner, A new force balanced accelerometer using tunneling tip position sensing, Abstr. Late News Papers, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 50-51.
6. M. Niksch, and G. Binnig, Proposal for a novel gravitational wave sensor, J. Vac. Sci. Technol., A6 (1988) 470-471.
7. M.F. Bocko, K.A. Stephenson and R.H. Koch, Vacuum tunneling probe: a nonreciprocal, reduced-back-action transducer, Phys. Rev. Lett., 61 (1988) 726-729.
8. J.H. Wandass, J.S. Murday and R.J. Colton, Magnetic-field sensing with magnetostrictive materials using a tunneling tip detector, Sensors and Actuators, 19 (1989) 211-225.
9. R.A. Brizzolara, R.J. Colton, M. Wun-Fogle and H.T. Savage, A tunneling-tip magnetometer, Sensors and Actuators, 20 (1989) 199-205.
10. R.A. Brizzolara and R.J. Colton, Magnetostriction measurements using a tunneling-tip strain detector, J. Magn. Mater., 88 (1990) 343-350.
11. T.W. Kenny, W.J. Kaiser, S.B. Waltman and J.K. Reynolds, Novel infrared detector based on a tunneling displacement transducer, Appl. Phys. Lett., 59 (1991) 1820-1822.
12. F. Rudolph, A. Jornod, J. Bergqvist and H. Leuthold, Precision accelerometers with μg resolution, Sensors and Actuators, A21-A23 (1990) 297-301.
13. H.K. Rockstad, T.W. Kenny, J.K. Reynolds, W.J. Kaiser, T.R. VanZandt and T.B. Gabrielson, A miniature high-resolution accelerometer utilizing electron tunneling, Tech. Digest, ASME Winter Annual Meet. DSC-40, Micromechanical Systems, Anaheim, CA, USA, 8-13 Nov., 1992, pp. 41-52.
14. H.K. Rockstad, T.W. Kenny, J.K. Reynolds, W.J. Kaiser and T.B. Gabrielson, A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, pp. 836-839.
15. H.K. Rockstad, T.W. Kenny, J.K. Reynolds, W.J. Kaiser and T.B. Gabrielson, A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers, Sensors and Actuators A, 43 (1994) 107-114.
16. T.B. Gabrielson, Mechanical-thermal noise in micromachined acoustic and vibration sensors, IEEE Trans. Electron Devices, ED-40 (1993) 903-909.
17. D.W. Abraham, C.C. Williams and H.K. Wickramasinghe, Noise reduction technique for scanning tunneling microscopy, Appl. Phys. Lett., 53 (1988) 1503-1505.
18. T.W. Kenny, unpublished.