CMOS interface circuitry for a low-voltage micromachined tunneling accelerometer

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 6-15

  Yeh, Chingwen ^b,c,d,e,f   Najafi, Khalil ^a,b,f  

^a IEEE

^b University of Michigan   (United States)

^c Input Output Inc   (United States)

^d NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^e Och Spine at New York Presbyterian Hospitals   (United States)

^f UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Interface circuitry; Micromachined accelerometer; Tunneling accelerometer

Indexed keywords

ACCELEROMETERS; ELECTRIC CURRENT CONTROL; EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DIODES; SENSITIVITY ANALYSIS; SENSORS; VOLTAGE CONTROL;

INTERFACE CIRCUITRY; MICROMACHINED TUNNELING ACCELEROMETER; TUNNELING CURRENT;

CMOS INTEGRATED CIRCUITS;

EID: 0032028949     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661379     Document Type: Article

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