An in-plane high-sensitivity, low-noise micro-g silicon accelerometer with CMOS readout circuitry

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 628-635

  Chae, Junseok ^a   Kulah, Haluk ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTRODES; MICROMACHINING; MICROSENSORS; POLYSILICON; READOUT SYSTEMS; SENSITIVITY ANALYSIS; SPURIOUS SIGNAL NOISE;

CMOS READOUT CIRCUITRY; INERTIAL SENSORS; MICROACCELEROMETERS; POLYSILICON SENSING ELECTRODES; SILICON ACCELEROMETER; SWITCHED CAPACITOR;

MICROELECTROMECHANICAL DEVICES;

EID: 4344594506     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832653     Document Type: Article

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