Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 235-243

  Liu, Cheng Hsien ^a,d,e,f   Barzilai, Aaron M ^a,f,g   Reynolds, Joseph Kurth ^a,f,h,i   Partridge, Aaron ^a,f,j   Kenny, Thomas W ^a   Grade, John D ^b   Rockstad, Howard K ^c  

^a Stanford University   (United States)

^b Quinta Corporation   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^d NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^e LEHIGH UNIVERSITY   (United States)

^f STANFORD UNIVERSITY   (United States)

^g MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^h CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

ⁱ Microdevices Laboratory   (United States)

^j Atomis Inc

more..

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRON TUNNELING; MICROGRAVITY PROCESSING; NATURAL FREQUENCIES; SENSORS; UNDERWATER ACOUSTICS;

TUNNELING ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099408     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679388     Document Type: Article

References (26)

1. L. M. Roylance, "Miniature integrated circuit accelerometer for biomedical applications," Ph.D. dissertation, Stanford Univ., Stanford, CA, 1978.
2. S. B. Waltman and W. J. Kaiser, "An electron tunneling sensor," Sens. Actuators, vol. 19, pp. 201-210, 1989.
3. T. W. Kenny, S. B. Waltman, J. K. Reynolds, and W. J. Kaiser, "Micromachined silicon tunneling sensor for motion detection," Appl. Phys. Lett., vol. 58, pp. 100-102, 1991.
4. _, "A novel infrared detector based on tunneling displacement transducer," Appl. Phys. Lett., vol. 59, pp. 1820-1822, 1991.
5. M. F. Bocko, K. A. Stephenson, and R. H. Koch, "Vacuum tunneling probe: A nonreciprocal reduced-back-action transducer," Phys. Rev. Lett., vol. 61, p. 726, 1988.
6. B. Yurke and G. Kochanski, "Momentum noise in vacuum tunneling transducers," Phys. Rev. B, vol. 41, p. 8184, 1990.
7. T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, p. 903, 1993.
8. H. K. Rockstad, T. K. Tang, J. K. Reynolds, T. W. Kenny, W. J. Kaiser, and T. B. Gabrielson, "A miniature, high-sensitivity, electron tunneling accelerometer," Sens. Actuators A, vol. 53, pp. 227-231, 1996.
9. C. Yeh and K. Najafi, "A low-voltage bulk-silicon tunneling-based microaccelerometer," in Int. Electron Device Meet. Dig., 1995. pp. 23.1.1-23.1.4.
10. _, "Micromachined tunneling accelerometer with a low-voltage CMOS interface circuit," in Solid-State Sensors and Actuators (Transducers '97), pp. 1213-1216.
11. J. Wang, B. McClelland, P. M. Zavracky, F. Hartley, and B. Dolgin, "Design, fabrication and measurement of a tunneling tip accelerometer," in Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1996, pp. 68-71.
12. R. L. Kubena, G. M. Atkinson, W. P. Robinson, and F. P. Stratton, "A new miniaturized surface micromachined tunneling accelerometer," IEEE Electron Device Lett., vol. 17, no. 6, pp. 306-308, 1996.
13. Y. Xu, N. C. MacDonald, and S. A. Miller, "Integrated micro-scanning tunneling microscope," Appl. Phys. Lett., vol. 67, pp. 2305-2307, 1995.
14. P. R. Scheeper, J. K. Reynolds, and T. W. Kenny, "Development of a modal analysis accelerometer based on a tunneling displacement transducer," in Solid-State Sensors and Actuators (Transducers '97), pp. 867-870.
15. T. W. Kenny, W. J. Kaiser, H. K. Rockstad, J. K. Reynolds, J. A. Podosek, and E. C. Vote, "Wide-bandwidth electromechanical actuators for tunneling displacement transducers," IEEE J. Microelectromech. Syst., vol. 3, p. 97, 1994.
16. G. Binning and H. Rohrer, "Scanning tunneling microscopy," IBM J. Res. Develop., vol. 30, pp. 355-369, 1986.
17. C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, and H. K. Rockstad, "A high-sensitivity micromachined accelerometer based on electron tunneling transducers," in ASME Winter Conf. - Symp. Micro-Electron Mechanical Syst., Dallas, TX, 1997, pp. 13-20.
18. T. W. Kenny, J. K. Reynolds, J. A. Podosek, E. C. Vote, L. M. Miller, H. K. Rockstad, and W. J. Kaiser, "Micromachined infrared sensors using tunneling displacement transducers," Rev. Sci. Instrum., vol. 67, p. 112, 1996.
19. H. K. Rockstad, T. W. Kenny, J. K. Reynolds, W. J. Kaiser, and T. B. Gabrielson, "A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers," Sens. Actuators A, vol. 43, pp. 107-114, 1994.
20. J. D. Grade, A. M. Barzilai, J. K. Reynolds, C. H. Liu, A. Partridge, T. W. Kenny, L. M. Miller, and J. A. Podosek, "Low frequency drift in tunneling sensors," in Solid-State Sensors and Actuators (Transducers '97), pp. 871-874.
21. P. G. Hartwell, F. M. Bertsch, S. A. Miller, K. L. Turner, and N. C. MacDonald, "Single mask lateral tunneling accelerometer," 11th IEEE Workshop Micro Electro Mechanical Syst., pp. 340-344.
22. J. Wang, B. McClelland, P. M. Zavracky, N. E. McGruer, and R. H. Morrison, "Study of tunneling noise using surface micromachined tunneling tip devices," in Solid-State Sensors and Actuators (Transducers '97), pp. 467-470.
23. J. D. Grade, A. M. Barzilai, J. K. Reynolds, C. H. Liu, A. Partridge, H. Jerman, and T. W. Kenny, "Wafer-scale processing, assembly, and testing of tunneling infrared detectors," in Solid-State Sensors and Actuators (Transducers '97), pp. 1241-1244.
24. I. Brodie, "Physical considerations in vacuum microelectronics devices," IEEE Trans. Electron Devices, vol. 36, pp. 2641-2644, 1989.
25. C. J. Chen, Introduction to Scanning Tunneling Microscopy. New York: Oxford Univ. Press, 1993, pp. 195-210.
26. K. H.-L. Chau, S. R. Lewis, Y. Zhao, R. T. Howe, S. F. Bart, and R. G. Mareselli, "An integrated force-balance capacitive accelerometer for low-g applications," in Solid-State Sensors and Actuators (Transducers '95), pp. 593-596.