Micromachined thermal accelerometer

Sensors and Actuators, A: Physical

Volumn 103, Issue 3, 2003, Pages 359-363

  Mailly, F ^a   Giani, A ^a   Martinez, A ^a   Bonnot, R ^a   Temple Boyer, P ^b   Boyer, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b LAAS CNRS   (France)

Author keywords

Accelerometer; Thermal sensor; Tilt measurement

Indexed keywords

ACCELEROMETERS; BANDWIDTH; ELECTRON BEAMS; EVAPORATION; RESISTORS; SENSORS; SILICON;

THERMAL ACCELEROMETERS;

MICROMACHINING;

EID: 0037443121     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00428-4     Document Type: Article

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