On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers

Journal of Micromechanics and Microengineering

Volumn 14, Issue 10, 2004, Pages 1281-1293

  Pedersen, Claus B W ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; AMPLIFIERS (ELECTRONIC); BOUNDARY CONDITIONS; OPTIMIZATION; RESONANCE; TOPOLOGY;

COMPLIANT FORCE; FORCE AMPLIFIERS; NOISE FLOOR; SINGLE-STAGE FORCE;

MICROMACHINING;

EID: 7044227892     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/10/001     Document Type: Article

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