Simulation and fabrication of HF microelectromechanical bandpass filter

Microelectronics Journal

Volumn 38, Issue 8-9, 2007, Pages 828-833

  Dai, Ching Liang ^a   Chiang, Ming Chao ^a   Chang, Ming Wei ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

CMOS; Microactuator; Micromechanical filter

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; ELECTRODES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SILICA; WET ETCHING;

COUPLING BEAM; DRIVING PART; MICROMECHANICAL FILTER; SACRIFICIAL LAYER; SENSING PART; SUSPENDED STRUCTURES;

BANDPASS FILTERS;

EID: 34748907432     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.07.070     Document Type: Article

References (24)

1. Zaki A., Elsimary H., and Zaghloul M. Microelectron. J. 38 (2007) 426-429
2. Miao J., Lin R., Chen L., Zou Q., Lim S.Y., and Seah S.H. Microelectron. J. 33 (2002) 21-28
3. Cho Y.S., Jang S.W., Sohn Y.S., and Choi S.Y. Microelectron. J. 38 (2007) 416-421
4. Wang X., Li B., Russo O.L., Roman H.T., Chin K.K., and Farmer K.R. Microelectron. J. 37 (2006) 50-56
5. Song Q., Cui Z., Xia S., and Chen S. Microelectron. J. 35 (2004) 817-821
6. Liu J., and Li X. Microelectron. J. 38 (2007) 210-215
7. Kimura M., Sakurai F., Ohta H., and Terada T. Microelectron. J. 38 (2007) 171-176
8. Darabi J., and Ekula K. Microelectron. J. 34 (2003) 1067-1074
9. Liew L.A., Tuantranount A., and Bright V.M. Microelectron. J. 31 (2000) 791-801
10. Dai C.L., Hsu H.M., Tsai M.C., Hsieh M.M., and Chang M.W. Microelectron. J. 38 (2007) 519-524
11. Fang H.B., Liu J.Q., Xu Z.Y., Dong L., Wang L., Chen D., Cai B.C., and Liu Y. Microelectron. J. 37 (2006) 1280-1284
12. Alastalo T., and Kaajakari V. IEEE Trans. Ultrason. Ferroelectron. Freq. Control 53 (2006) 1662-1670
13. Galayko D., Kaiser A., Legrand B., Buchaillot L., Collard D., and Combi C. Sensor Actuator A 117 (2005) 115-120
14. Motiee M., Mansour R.R., and Khajepour A. J. Micromech. Microeng. 16 (2006) 407-418
15. S. Catoni, R. Marcelli, G. Bartolucci, in: Proceedings of the International Semiconductor Conference CAS, 2004, pp. 509-512.
16. Bannon F.D., Clark J.R., and Nguyen C.T.C. IEEE J. Solid State Circuits 35 (2000) 512-526
17. J.R. Clark, F.D. Bannon III, A.C. Wong, C.T.C. Nguyen, in: Proceedings of the International Conference on Soild State Sensors and Actuators, 1997, pp. 1611-1164.
18. Yang L.J., Huang T.W., and Chang P.Z. Sensor Actuator A 90 (2001) 148-152
19. Ristic L. Microelectron. J. 20 (1989) 153-169
20. Cheng Y.C., Dai C.L., Lee C.Y., Chen P.H., and Chang P.Z. Microsyst. Technol. 11 (2005) 444-451
21. Dai C.L., and Chen J.H. Microsyst. Technol. 12 (2006) 1143-1151
22. Senturia S.D. Microsystem Design (2001), Kluwer Academic, Boston p. 196
23. Dai C.L. Microelectron. Eng. 83 (2006) 2543-2550
24. Q. Jing, H. Luo, T. Mukherjee, L.R. Carley, G.K. Fedder, in: Proceedings of IEEE Micro Electro Mechanical Systems, 2000, pp. 187-192.