A circular micromirror array fabricated by a maskless post-CMOS process

Microsystem Technologies

Volumn 11, Issue 6, 2005, Pages 444-451

  Cheng, Y C ^a   Dai, C L ^b   Lee, C Y ^c   Chen, P H ^a   Chang, P Z ^d  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c YUAN ZE UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; ELECTRIC POWER UTILIZATION; ETCHING; MIRRORS; OPTICAL INTERCONNECTS; OPTICAL SWITCHES; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VLSI CIRCUITS;

CIRCULAR MICROMIRROR ARRAYS; LIGHT BEAMS; MICROMIRRORS; SINGLE POLYSILICON FOUR METALS (SPFM);

MICROELECTROMECHANICAL DEVICES;

EID: 18744396111     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0486-0     Document Type: Article

References (0)