Tunable passband T-filter with electrostatically-driven polysilicon micromechanical resonators

Sensors and Actuators, A: Physical

Volumn 117, Issue 1, 2005, Pages 115-120

  Galayko, Dimitri ^a   Kaiser, Andreas ^a   Legrand, Bernard ^a   Buchaillot, Lionel ^a   Collard, Dominique ^b   Combi, Chantal ^c  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b UNIVERSITY OF TOKYO   (Japan)

^c STMICROELECTRONICS   (Italy)

Author keywords

Electrostatically driven resonators; Passband; T filter; Transmission zero; Tunable

Indexed keywords

BANDPASS FILTERS; CAPACITORS; ELECTROSTATICS; PARAMETER ESTIMATION; SENSORS; TRANSDUCERS;

POLYSILICON MICROMACHINING; T-FILTERS; TRANSMISSION ZERO;

RESONATORS;

EID: 9644266799     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.002     Document Type: Letter

References (7)

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