Design of band-pass micromachined filters based on fixed-fixed beam resonators

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 2004, Pages 509-512

  Catoni, Simone ^a,b   Marcelli, Romolo ^a,b   Bartolucci, Giancnrlo ^c  

^a IEEE   (Italy)

^b CNR   (Italy)

^c UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

MEMS; Micromachining; Resonators

Indexed keywords

FIXED-FIXED BEAM MICROMECHANICAL RESONATORS; MEMS;

BANDWIDTH; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; Q FACTOR MEASUREMENT; RESONATORS; VACUUM;

BANDPASS FILTERS;

EID: 27844488970     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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