Modeling and fabrication of a microelectromechanical microwave switch

Microelectronics Journal

Volumn 38, Issue 4-5, 2007, Pages 519-524

  Dai, Ching Liang ^a   Hsu, Heng Ming ^a   Tsai, Ming Chang ^a   Hsieh, Ming Ming ^a   Chang, Ming Wei ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

CMOS; Micro actuator; Microwave switch

Indexed keywords

CMOS INTEGRATED CIRCUITS; COPLANAR WAVEGUIDES; ELECTRIC SWITCHES; INSERTION LOSSES; MICROACTUATORS; WET ETCHING;

MICROWAVE SWITCH; SACRIFICIAL LAYERS; SUSPENDED MEMBRANE; SUSPENDED STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 34249288960     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.03.012     Document Type: Article

References (16)

1. Hah D., Yoon E., and Hong S. IEEE Trans. Microwave Theor Tech. 48 (2000) 2540-2545
2. Lucyszyn S. IEE Proc. Sci. Meas. Technol. 151 (2004) 93-103
3. Rebeiz G.M., and Muldavin J.B. IEEE Microwave mag. 2 (2001) 59-66
4. C.V. Jahnes, J. Cotte, J.L. Lund, H. Deligianni, A. Chinthakindi, L.P. Buchhalter, P. Fryer, J.A. Tornello, N. Hoivik, J.H. Magerlein, D. Seeger, in: IEEE International Conference of Micro Electro Mechanics Systems, 2004, pp. 782-792.
5. Majumder S., Lampen J., Morrison R., and Maciel J. IEEE Instrum. Meas. 6 (2003) 12-15
6. S.P. Pacheco, L.P.B. Katehi, C.T.C. Nguyen, in: IEEE MTT-S International Microwave Symposium Digest, 2000, pp 165-168.
7. S. Ghosh, M. Bayoumi, in: IEEE-NEWCAS Conference, 2005, pp. 31-34.
8. Yao J.J. J. Micromech. Microeng. 10 (2000) R9-R38
9. C. Goldsmith, J. Randall, S. Eshelman, T.H. Lin, D. Denniston, S. Chen, B. Norvell, in: IEEE MTT-S International Microwave Symposium Digest, 1996, pp. 1141-1144.
10. Doan C.H., Emami S., Niknejad A.M., and Brodersen R.W. IEEE J. Solid-State Circuits 40 (2005) 144-155
11. Dai C.L. Microelectron. Eng. 83 (2006) 2543-2550
12. Cheng Y.C., Dai C.L., Lee C.Y., Chen P.H., and Chang P.Z. Sensors Actuators. A 120 (2005) 573-581
13. Dai C.L., and Yu W.C. Microsyst. Technol. 12 (2006) 766-772
14. Pakula L.S., Yang H., Pham H.T.M., French P.J., and Sarro P.M. J. Micromech. Microeng. 14 (2004) 1478-1483
15. Dai C.L., Peng H.J., Liu M.C., Wu C.C., Hsu H.M., and Yang L.J. Jpn. J. Appl. Phys. 44 (2005) 6804-6809
16. M.C.A.M. Koolen, J.A.M. Geelen, M.P.J.G. Versleijen, An improved de-embedding technique for on-wafer high-frequency characterization, in: IEEE Proceedings of Bipolar/BiCMOS Circuit Technology Meeting, 1991, pp. 188-191.