Miniature SAW device using MEMS technology

Microelectronics Journal

Volumn 38, Issue 3, 2007, Pages 426-429

  Zaki, Amal ^a   Elsimary, Hamed ^a   Zaghloul, Mona ^b  

^a ELECTRONICS RESEARCH INSTITUTE   (Egypt)

^b GEORGE WASHINGTON UNIVERSITY   (United States)

Author keywords

MEMS technology; SAW device

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION; MEMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPUTTERING;

RF-SAW FILTER; SAW DEVICE;

WIRELESS TELECOMMUNICATION SYSTEMS;

EID: 34147119487     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.11.010     Document Type: Article

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