Novel MEMS filters for on-chip transceiver architecture, modeling and experiments

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 407-418

  Motiee, Mehrnaz ^a   Mansour, Raafat R ^a   Khajepour, Amir ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROPROCESSOR CHIPS; OPTIMIZATION; RESONATORS; TRANSCEIVERS;

COUPLING ELEMENTS; FILTER DESIGN; FLEXURAL-MODE BEAM; LUMPED MODEL;

MICROELECTROMECHANICAL DEVICES;

EID: 31344449311     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/027     Document Type: Article

References (19)

1. Ngyen C-C 2001 Transceiver front-end architecture using vibrating micromechanical signal processors Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (IEEE, September 2001) pp 23-32
2. Wang K and Nguyen C T-C 1999 High order medium frequency micromechanical electronic filters J. Microelectromech. Syst. 8 534-57
3. Bannon F D, Clark J R and Nguyen C T-C 2000 High-Q HF micromechanical filters IEEE J. Solid-State Circuits 35 512-57
4. Hsu W-T, Clarck J R and Nguyen C T-C 2000 Mechanically temperature compensated flexural mode micromechanical resonators Technical Digest of IEEE International Electron Devices Meeting (San Francisco, Los Angles, 11-13 December 2000) pp 399-402
5. Clark R, Hsu W-T and Nguyen C-C 2000 High-Q VHF micromechanical contour-mode disk resonators IEEE International Electron Devices Meeting pp 399-402
6. Hsu W-T, Clark J and Nguyen C-C 2001 Q-optimized lateral free-free beam micromechanical resonators IEEE Solid-State Sensors and Actuators (Transducers'01) pp 1110-3
7. Hsu W-T, Clarck J R and Nguyen C T-C 2001 A sub-micron gap process for multiple-metal-electrode lateral micromechanical resonators Technical Digest of IEEE International Micro Electro Mechanical Systems Conference (Switzerland, Interlaken, 21-25 January 2001) pp 349-52
8. Greywell D S and Busch P A 2002 Coupled micromechanical drumhead resonators with practical applications as electromechanical bandpass filters J. Micromech. Microeng. 12 925-38
9. Koester D A, Mahadevan R, Hardy B and Markus K W 2003 PolyMUMPs Design Handbook 8th edn (Research Triangle Park, NC: JDS Uniphase Company)
10. Park A, Elwenspoek M and Fluitman J H J 1992 Selective mode excitation and detection of micromachined resonators J. Microelectromech. Syst. 1 179-86
11. CoventorWare Software 2003 3rd edn http://www.Coventor.com
12. Inman D J 1996 Engineering Vibration 2nd edn (Englewood Cliffs, NJ: Prentice-Hall)
13. Motiee M 2003 MEMS IF/RF filters Master's Thesis Department of Mechanical Engineering, University of Waterloo, Waterloo, Canada
14. Tilmans H A C 1996 Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems J. Micromech. Microeng. 6 157-76
15. Senturia S D 2001 Microsystem Design 3rd edn (New York: Kluwer)
16. Nguyen C T-C 1999 Micromechanical components for miniaturized low-power communications Proc. IEEE-MTT-S pp 48-77
17. Zverev A I 1967 Handbook of Filter Synthesis 1st edn (New York: Wiley)
18. Motiee M, Khajepour A and Mansour R R 2003 Modeling and analysis of RF MEMS filters ASME International Mechanical Engineering Congress and Exposition (IMECE-41568, Washington, DC, 16-21 November 2003)
19. Agilent Technologies HP Advanced Design System (ADS) Software www.agilent.com