Design and fabrication of a vibration sensor using a conductive ball

Microelectronics Journal

Volumn 38, Issue 3, 2007, Pages 416-421

  Cho, Yong Soo ^a   Jang, Sung Wook ^a   Sohn, Young Soo ^b   Choi, Sie Young ^a  

^a Kyungpook National University   (South Korea)

^b Daegu Gyeongbuk Institute of Science and Technology   (South Korea)

Author keywords

Conductive ball; Convex corner rounding; MEMS; Vibration sensor

Indexed keywords

ANISOTROPY; ENCAPSULATION; MEMS; METALLIC FILMS; MICROMACHINING; VIBRATION MEASUREMENT;

CONDUCTIVE BALL; CONVEX CORNER ROUNDING; VIBRATION SENSORS;

SENSORS;

EID: 34147143866     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.01.007     Document Type: Article

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