An ac microcalorimeter for measuring specific heat of thin films

Microelectronics Journal

Volumn 35, Issue 10, 2004, Pages 817-821

  Song, Qinglin ^a   Cui, Zheng ^b   Xia, Shanhong ^a   Chen, Shaofeng ^a  

^a INSTITUTE OF ELECTRONICS   (China)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Ac measurement; MEMS; Thermal property of thin films

Indexed keywords

CALORIMETERS; FABRICATION; GEOMETRY; MICROELECTROMECHANICAL DEVICES; SENSORS; SILICA; SPECIFIC HEAT; THIN FILMS;

AC MEASUREMENT; MEMBRANE STRUCTURE; MICROCALORIMETERS; THERMAL PROPERTY OF THIN FILMS;

MICROELECTRONICS;

EID: 4444332694     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2004.06.013     Document Type: Conference Paper

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