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Volumn 34, Issue 11, 2003, Pages 1067-1074
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Development of a chip-integrated micro cooling device
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Author keywords
EHD; Electrohydrodynamics; Electronic cooling; Micro cooling device; Micropump; Polarization; Thin film evaporation
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Indexed keywords
MICRO COOLING DEVICE;
COOLING;
ELECTRODES;
ELECTROHYDRODYNAMICS;
HEAT TRANSFER;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONICS;
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EID: 0142216265
PISSN: 00262692
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mejo.2003.09.010 Document Type: Article |
Times cited : (109)
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References (12)
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