Systematic design approach for capacitively coupled microelectromechanical filters

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 9, 2006, Pages 1662-1670

  Alastalo, Ari T ^b   Kaajakari, Ville ^a,b  

^a IEEE   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER TO INTERFERENCE RATIO; COMMUNICATION TERMINALS; FILTER DESIGNS; INTERMODULATION DISTORTION;

HAND HELD COMPUTERS; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; SIGNAL RECEIVERS; SPECIFICATIONS; TERMINALS (ELECTRIC);

BANDPASS FILTERS;

EID: 33748343407     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1678194     Document Type: Article

References (19)

1. H. C. Nathansona, W. E. Newell, R. A. Wickstrom, and J. R. Davis, "The resonant gate transistor," IEEE Trans. Electron Devices, vol. 14, no. 2, pp. 117-133, Mar. 1967.
2. C. T.-C. Nguyen and R. T. Howe, "CMOS micromechanical resonator oscillator," in Tech. Dig. IEEE Int. Electron Devices Meeting, Washington, DC, 5-8 Dec. 1993, pp. 199-202.
3. H. Tilmans, "Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems," J. Micromech. Microeng., vol. 6, no. 1, pp. 157-176, Mar. 1996.
4. L. Lin, R. T. Howe, and A. P. Pisano, "Microelectromechanical filters for signal processing," J. Microelectromech. Syst., vol. 7, no. 3, pp. 286-294, Sep. 1998.
5. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices," IEEE Trans. Microwave Theory Tech., vol. 47, no. 8, pp. 1486-1503, Aug. 1999.
6. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications," IEEE Electron Device Lett., vol. 25, no. 4, pp. 173-175, Apr. 2004.
7. J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vinrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
8. R. Navid, J. R. Clark, M. Demirci, and C. T.-C. Nguyen, "Thirdorder intermodulation distortion in capacitively-driven cc-beam micromechanical resonators," in Tech. Dig. Int. IEEE Microelectromechanical Syst. Conf., Interlaken, Switzerland, 21-25 Jan. 2001, pp. 228-231.
9. A. T. Alastalo and V. Kaajakari, "Intermodulation in capacitively coupled microelectromechanical filters," IEEE Electron Device Lett., vol. 26, no. 5, pp. 289-291, May 2005.
10. A. T. Alastalo and V. Kaajakari, "Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers," J. Microelectromech. Syst., vol. 15, no. 1, pp. 141-148, Feb. 2005.
11. A. T. Alastalo and V. Kaajakari, "Designing capacitively coupled microelectromechanical filters," in Proc. IEEE Ultrason. Symp., Rotterdam, The Netherlands, 18-21 Sep. 2005, pp. 1588-1591.
12. S. Pourkamali and F. Ayazi, "Electrically coupled MEMS bandpass filters: Part I: With coupling element," Sens. Actuators A, vol. 122, no. 2, pp. 307-316, Aug. 2005.
13. Aplac RF Design Tool, APLAC An AWR Company, www.aplac.com.
14. T. Veijola and T. Mattila, "Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method," Int. J. RF Microwave Computer-Aided Eng., vol. 11, no. 5, pp. 310-321, Sep. 2001.
15. European Telecommunications Standards Institute (ETSI), "GSM global system for mobile communications, 3GPP TS 05.01/05.05," 2003.
16. T. Ranta, J. Ellä, and H. Pohjonen, "Antenna switch linearity requirements for GSM/WCDMA mobile phone front-ends," in 8th Eur. Conf. Wireless Technol., Paris, France, 3-4 Oct. 2005, pp. 23-26.
17. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Micromechanical 'hollow-disk' ring resonators," in Tech. Dig. Int. IEEE Microelectromechanical Syst. Conf., Maastricht, The Netherlands, 25-29 Jan. 2001, pp. 821-824.
18. T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "12 MHz micromechanical bulk acoustic mode oscillator," Sens. Actuators A, vol. 101, no. 1-2, pp. 1-9, Sep. 2002.
19. S. A. Bhave and R. T. Howe, "Internal electrostatic transduction for bulk-mode MEMS resonators," in Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, SC, 6-10 June 2004, pp. 59-60.