Wide bandgap UV photodetectors: A short review of devices and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6473, Issue , 2007, Pages

  Omnès, Franck ^a   Monroy, Eva ^b   Muñoz, Elias ^c   Reverchon, Jean Luc ^d  

^a LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^b CEA GRENOBLE   (France)

^c UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^d THALES RESEARCH AND TECHNOLOGY   (France)

Author keywords

Diamond; III nitrides; Si photodiode; SiC photodiode; Ultraviolet detectors; Wide bandgap semiconductors

Indexed keywords

DIAMONDS; ENERGY GAP; NITRIDES; PHOTODIODES; SEMICONDUCTOR DEVICES; SILICON CARBIDE;

BIOLOGICAL APPLICATIONS; SIC PHOTODIODES; WIDE BANDGAP SEMICONDUCTORS;

ULTRAVIOLET DETECTORS;

EID: 34248672855     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.705393     Document Type: Conference Paper

References (73)

1. R.D.McKeag, S.S.M.Chan, R.B.Jackman, Appl.Phys.Lett. 67, 2117 (1995)
2. M.D.Whitfield, S.S.M.Chan, R.B.Jackman, Appl.Phys.Lett. 68, 290 (1996)
3. A.Mainwood, Semicond.Sci.Technol. (UK) 15, R55 (2000)
4. R.Korde and J.Geist, Appl.Opt. 26, 5284 (1987)
5. L.R.Canfield, J.Kerner, and R.Korde, Appl.Opt. 28, 3940 (1989)
6. Y.A.Goldberg, Semicond.Sci.Technol. 14, R41 (1999)
7. M.Razeghi and A.Rogalski, J.Appl.Phys. 79, 7433 (1996)
8. J.A.Edmond, H.S.Kong, C.H.Carter Jr., Phys. B 185, 453 (1993)
9. M.M.Anikin, A.N.Andreev, S.N.Pyatko, N.S.Savkina, A.M.Strelchuk, A.L.Syrkin, and V.E.Chelnokov, Sensors and Actuators A 33, 91 (1992)
10. F.Yan, X.Xin, S.Aslam, Y.Zhao, D.Franz, J.H.Zhao, and M.Weiner, J.Quant.electron. 40(9), 1315 (2004)
11. M.R.,Werner and W.R.Fahmer, IEEE Trans.Industrial Electron., 48(2), 249 (2001)
12. th Annual Dev.Res.Conference Digest, p.56 (1998)
13. H.J.Loi, M.D.Whitfield, and R.B.Jackman, Appl.Phys.Lett. 74, 3332 (1999)
14. S.P.Lansley, H.J.Looi, Y.Wang, M.D.Whitfield, and R.B.Jackman, Appl.Phys.Lett. 74, 615 (1999)
15. T.Teraji, S.Yoshizaki, H.Wada, M.Hamada, and T.Ito, Diamond and Related Mater. 13, 858 (2004)
16. J.I.Pankove and J.E.Berkeyheiser, J.Appl.Phys. 45, 3892 (1974)
17. E.Monroy, F.Calle, E.Muñoz, F.Omnes, B.Beaumont, P.Gibart, J.Electron.Mater.28, 238 (1999)
18. E.Muñoz, E.Monroy, J.A.Garrido, I.Izpura, F.J.Sanchez, M.A.Sanchez-Garcia, E.Calleja, B.Beaumont, and P.Gibart, Appl.Phys.Lett. 71, 870 (1997)
19. D.Walker, X.Zhan, A.Saxler, P.Kung, J.Xu, and M.Razeghi, Appl. Phys. Lett. 70, 949 (1997)
20. P.Kung, X.Zhang, D.Walker, A.Saxler, J.Piotrowsky, A.Rogalski, and M.Razeghi, Appl. Phys. Lett. 67, 3792 (1995)
21. L.B.Flannery, I.Harrisson, D.E.Lacklison, R.I.Dykeman, T.S.Chen, and C.T.Foxon, Mat.Sci.Eng. B 50, 307 (1997)
22. B.Shen, K.Yang, L.Zhan, Z.Chen, Y.Zhou, P.Chen, R.Zhan, Z.Huang, H.Zhou, and Y.Zheng, Jpn.J.Appl.Phys. 38, 767 (1999)
23. E.Monroy, F.Calle, E.Muñoz, F.Omnes, P.Gibart, and J.A.Muñoz, Appl.Phys.Lett. 73, 2146 (1998)
24. E.Monroy, F.Calle, E.Muñoz, B.Beaumont, F.Omnes, P.Gibart, Electron.Lett. 35, 1488 (1999).
25. E. Monroy, F. Calle, E. Muñoz, and F. Omnes, Appl. Phys. Lett. 74, 3401 (1999)
26. E.Monroy, F.Calle, E.Muñoz, and F.Omnes, Physica Status Solidi A 176, 157 (1999)
27. J.Li, Y.Xu, T.Y.Hsiang, W.R.Donaldson, Appl.Phys.Lett. 84(12), 2091 (2004)
28. M.Mosca, J.L.Reverchon, N.Grandjean, and J.Y Duboz, IEEE J. of Selected Topics in Quant.Electron. 10(4), 752 (2004)
29. M.Mosca, J.L.Reverchon, N.Grandjean, F.Omnes, J.Y.Duboz, I.Ribet, and M.Tauvy, Mat.Res.Proc.Vol. 764, 315 (2003)
30. G.Mazzeo, J.L.Reverchon, J.Y.Duboz, A.Dussaigne, IEEE Sensors Journal 6(4), 957 (2006)
31. X.Zhang, P.Kung, D.Walker, J.Piotrowski, A.Rogalski, A.Saxler, and M.Razeghi, Appl.Phys.Lett. 67, 2028 (1995).
32. Q.Chen, M.A.Khan, C.J.Sun, and J.W.Yang, Electron.Lett. 31, 1781 (1995).
33. E.Monroy, E.Muñoz, F.J.Sanchez, F.Calle, E.Calleja, B.Beaumont, P.Gibart, J.A.Muñoz, and F.Cusso, Semicond.Sci.Technol.13, 1024 (1998).
34. A.Osinsky, S.Gangopadhyay, R.Gaska, B.Williams, M.A.Khan, D.Kuksenkov, and H.Temkin, Appl.Phys.Lett. 71, 2334(1997).
35. J.M.Van Hove, R.Hickman, J.J.Klaassen, P.P.Chow, and P.P.Ruden, Appl.Phys.Lett. 70, 2282 (1997).
36. D.Walker, A.Saxler, P.Kung, X.Zhang, M.Hamilton, J.Diaz, and M.Razeghi, Appl.Phys.Lett. 72, 3303 (1998).
37. J.C.Carrano, T.Li, P.A.Grudowski, C.J.Eiting, D.Lambert, J.D.Schaub, R.D.Dupuis, and J.C.Campbell, Electron.Lett. 34, 692 (1998).
38. J.C.Carrano, T.Li, D.L.Brown, P.A.Grudowski, C.J.Eiting, R.D.Dupuis, and J.C.Campbell, Electron.Lett. 34, 1779 (1998).
39. G.Y.Xu, A.Salvador, W.Kim, Z.Fan, C.Lu, H.Tang, H.Morkoç, G.Smith, M.Estes, B.Goldenberg, W.Yang, and S.Krishnankutty, Appl.Phys.Lett. 71, 2154 (1997).
40. S.Krishnankutty, W.Yang, T.Nohava, and P.P.Ruden, MRS Internet J.Nitride Semicond.Res. 3, art.7 (1998).
41. W.Yang, T.Nohava, S.Krishnankutty, R.Torreano, S.McPherson, and H.Marsh, Appl.Phys.Lett. 73, 978 (1998).
42. C.J.Collins, T.Li, A.L.Beck, R.D.Dupuis, J.C.Campbell, J.C.Carrano, M.J.Schurman, and I.T.Ferguson, Appl.Phys.Lett. 75, 2138 (1999).
43. J.D.Brown, Z.Yu, J.Matthews, S.Harney, J.Boney, J.F.Schetzina, J.D.Benson, K.D.W.Dang, C.Terril, T.Nohava, W.Yang and S.Krishnankutty, MRS Internet J.Nitride Semicond. Res. 4, art. 9 (1999).
44. J.D. Brown, J. Boney, J. Matthews, P. Srinavasan, J.F. Schetzina, T.Nohava, W.Yang, and S.Krishnankutty, MRS Internet J.Nitride Semicond. Res. 5, art. 6 (2000).
45. P.Sandvik, D.Walker, P.Kung, K.Mi, F.Shahedipour, V.Kumar, X.Zhang, J.Diaz, C.Jelen, and M.Razeghi, Proceedings SPIE 3948, 265 (2000).
46. E.Monroy, M.Hamilton, D.Walker, P.Kung, F.J.Sanchez, and M.Razeghi, Appl.Phys.Lett. 74, 1171 (1999).
47. D.Walker, P.Kung, P.Sandvik, J.Wu, M.Hamilton, I.H.Lee, J.Diaz, and M.Razeghi, Proceedings SPIE 3629, 193 (1999).
48. Q.Chen, J.W.Yang, A.Osinsky, S.Gangopadhyay, B.Lim, M.Z.Anwar, M.A.Khan, D.Kuksenkov, and H.Temkin, Appl.Phys.Lett. 70, 2277 (1997)
49. D.L.Pulfrey and B.D.Nener, Solid-State Electron. 42, 1731 (1998).
50. J.C.Carrano, T.Li, C.J.Eiting, R.D.Dupuis, and J.C.Campbell, J Electron.Mater. 28, 325 (1999).
51. D.W.Kuksenkov, H.Temkin, A.Osinsky, R.Gaska, and M.A.Khan, J.Appl.Phys. 83,2142 (1998)
52. G.Parish, S.Keller, P.Kozodoy, J.P.Ibbetson, H.Marchand, P.T.Fini, S.B.Fleischer, S.P.Den Baars, U.K.Mishra, and EJ.Tarsa, Appl.Phys.Lett. 75, 247 (1999).
53. L.S.Yu, Q.Z.Liu, Q.J.Xing, D.J.Qiao, S.S.Lau, and J.D.Redwing, J.Appl.Phys. 84, 2099 (1998).
54. M.C.Chen, J.K.Sheu, M.L.Lee, C.J.Tun, and G.C.Chi, Appl.Phys.Lett. 89, 183509 (2006)
55. M.C.Chen, J.K.Sheu, M.L.Lee, C.J.Kao, and G.C.Chi, Appl.Phys.Lett. 88, 203508 (2006)
56. P. Bhattacharya,"Semiconductor Optoelectronic Devices", Prentice Hall (New Jersey, 1994).
57. A.Osinsky, M.S.Shur, R.Gaska, and Q.Chen, Electron.Lett. 34, 691 (1998).
58. J.C.Carrano, D.J.H.Lambert, C.J.Eiting, C.J.Collins, T.Li, S.Wang, B.Yang, A.L.Beck, R.D.Dupuis, and J.CCampbell, Appl.Phys.Lett. 76, 924 (2000).
59. K.A.McIntosh, R.J.Molnar, L.J.Mahoney, K.M.Molvar, N.Efremow Jr., and S.Verghese, Appl.Phys.Lett. 76, 3938 (2000).
60. J.B.Limb, D.Yoo, J.H.Ryou, W.Lee, S.C.Chen, R.D.Dupuis, M.L.Reed, C.J.Collins, M.Wraback, D.Hanser, E.Preble, N.M.Williams, and K.evans, Appl.Phys.Lett. 89,011112 (2006)
61. M.A.Khan, M.S.Shur, Q.Chen, J.N.Kuznia, and C.J.Sun, Electron.Lett. 31, 398 (1995).
62. J.Pereiro, C.Rivera, J.L.Pau, A.Navarro, S.Fernadez-Garrido, and E.Muñoz, European Workshop on Ill-Nitride Semiconductor Materials and Devices, Heraklion, Crete, 18-20 Sept. 2006
63. C.Rivera, J.L.Pau, A.Navarro, and E.Muñoz, Superlattices and Microstructures 36, 849 (2004)
64. C.Rivera, J.L.Pau, A.Navarro, and E.Muñoz, IEEE J.Quant.Electron. 42, 51 (2006)
65. S.K.Zhang, W.B.Wang, F.Yun, L.He, H.Morkoç, X.Zhou, M.Tamargo, and R.R.Alfano, Appl.Phys.Lett. 81, 4628 (2002)
66. A.Teke, S.Dogan, L.He, D.Huang, F.Yun, M.A.Reshikov, H.Le, X.Q.Liu, H.Morkoç, S.K.Zhang, W.B.Wang, and R.R.Alfano, Solid State Electron. 47, 1401 (2003)
67. C.Rivera, J.LPau, E.Muñoz, P.Misra, O.Brandt, H.T.Grahn, and K.H.Ploog, Appl.Phys.Lett. 88, 213507 (2006)
68. A. F. McKinley and B. L. Diffey, CIE Journal 6, 17 (1987).
69. F. R. De Gruji and J.C. Van der Leun, Health Phys. 67, 314 (1994).
70. R. B. Setlow, Proc. Natl. Acad. Sci. USA 71, 3363 (1974).
71. L. W. Jones and B. Kok, Plant Physiol. 41, 1037 (1966).
72. E. Muñoz, E. Monroy, F. Calle, M. A. Sanchez, E. Calleja, F. Omnes, P. Gibart, F. Jaque, and I. Aguirre de Carcer, SPIE Proc. 3629, 200 (1999).
73. E. Muñoz, E. Monroy, F. Calle, F. Omnes, and P. Gibart, Journal of Geophysical Research 105, 4865 (2000).