MEMS based voltage references

VTT Publications

Volumn , Issue 613, 2006, Pages 3-109

  Kärkkäinen, Anna Maija ^a  

^a NONE

Author keywords

AC voltage reference; DC voltage reference; Electrostatic charging; Long term stability; MEMS; Micro electromechanical systems; Micromachining; Pull in voltage

Indexed keywords

EID: 34247385501     PISSN: 12350621     EISSN: 14550849     Source Type: Book Series    
DOI: None     Document Type: Article

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