Ultra-thin insulator covered silicon: Potential barriers and tunnel currents

Solid-State Electronics

Volumn 46, Issue 2, 2002, Pages 235-241

  Mizsei, János ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Electron tunneling; Native oxide; Surface charge, Fermi level pinning; Surface potential; Surface voltage; Vibrating capacitor

Indexed keywords

CAPACITORS; ELECTRIC CURRENTS; ELECTRON TUNNELING; FERMI LEVEL; SEMICONDUCTING SILICON;

ULTRA-THIN INSULATOR LAYERS; VIBRATING CAPACITORS;

SEMICONDUCTOR INSULATOR BOUNDARIES;

EID: 0036466937     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(01)00300-8     Document Type: Article

References (13)

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7. 2
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