Microelectromechanical systems in electrical metrology

IEEE Transactions on Instrumentation and Measurement

Volumn 50, Issue 2, 2001, Pages 440-441

  Seppä, Heikki ^a   Kyynaäraäinen, Jukka ^a   Oja, Aarne ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Current; Microelectromechanics; Sensors; Voltage

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC MEASURING INSTRUMENTS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; METALLIZING; SINGLE CRYSTALS; SURFACES;

ELECTRICAL METROLOGY; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035309839     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.918161     Document Type: Article

References (12)

1. B. P. van Drieënhuizen (Drieenhuizen) R. F. Wolffenbuttel Integrated electrostatic RMS-to-DC converter using IC-compatible surface micromachining Proc. Transducers'95 130 133 Proc. Transducers'95 Sweden Stockholm 1995-June 5818 15511 717110
2. B. P. van Drieënhuizen (Drieenhuizen) Integrated Electrostatic RMS-to-DC Converter 1996 Ph.D. Thesis The Netherlands, Delft
3. M. Suhonen H. Seppä (Seppa) A. S. Oja M. Heinilä (Heinila) I. Näkki (Nakki) AC and DC voltage standards based on silicon micromechanics Proc. Dig., CPEM'98 23 24 Proc. Dig., CPEM'98 Washington DC 1998-July 5667 15175 699739
4. T. Sillanpää (Sillanpaa) A. S. Oja H. Seppä (Seppa) Micromechanical silicon scale Proc. Dig., CPEM'98 106 107 Proc. Dig., CPEM'98 Washington DC 1998-July 5667 15175 699805
5. H. Seppä (Seppa) H. Sipola A high open-loop gain controller Rev. Sci. Instrum. 61 2449 2451 1990
6. N. C. MacDonald F. M. Bertsch K. A. Shaw S. G. Adams Capacitance Based Tunable Micromechanical Resonators 1997
7. J. Bienstman J. Vandewalle R. Puers The autonomous impact resonator: A new operating principle for a silicon resonant strain gauge Sens. Actuators 66 40 49 1998
8. R. Hoffmann Handbook of Microwave Integrated Circuits 1987 Artech House MA, Norwood
9. H. Seppä (Seppa) Method and Apparatus for Converting Electromagnetic Energy at Target Objects 2000
10. D. A. Buchanan R. A. Abram M. J. Morant Charge trapping in silicon-rich Si $_{3}$ N $_{4}$ thin films Solid-State Electron. 30 1295 1301 1987
11. J. Wibbeler G. Pfeifer M. Hietschold Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) Sens. Actuators 71 74 80 1998
12. A. S. Oja J. Kyynäräinen (Kyynarainen) H. Seppä (Seppa) T. Lampola A micromechanical DC voltage reference Proc. Dig., CPEM'2000 701 702 Proc. Dig., CPEM'2000 Sydney Australia 2000-May 6870 18483 851204