Design of resonators for the determination of the temperature coefficients of elastic constants of monocrystalline silicon

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1997, Pages 791-799

  Bourgeois, C ^a   Steinsland, E ^a   Blanc, N ^a   de Rooij, N F ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; CURVE FITTING; ELECTROSTATICS; EQUIVALENT CIRCUITS; MICROMACHINING; SEMICONDUCTING SILICON; TEMPERATURE MEASUREMENT; VIBRATIONS (MECHANICAL);

ELASTIC CONSTANTS; TEMPERATURE COEFFICIENTS;

CRYSTAL RESONATORS;

EID: 0031360360     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)